Holger Daßler, Wolfgang Manthey, Lutz Thieme:
Holger Daßler, Wolfgang Manthey, Lutz Thieme:
Characterisation and optimization of micromachined ultrasonic transducer arrays
using laseroptical investigations
Novel laseroptical investigations of mechanical and electrical features of PVDF-based ultrasonic transducer
arrays for applications in liquids are described. The thickness vibrations in the range of less than 2 nm with
exceptional high frequencies for MEMs (up to 20 MHz) are measured using a surface line scan with a lateral
resolution of a few micrometres. The knowledge of the electromechanical behavior leads to an improvement
of the transducer array design.
SENSOR 99 (Sensors Transducers & Systems); Nürnberg; 18.-20.05.1999
Proceeding.pdf (405 KB)
